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TESCOM Products: HPC 1/4" Point of Use Pressure Regulators

Semiconductor/Photovoltaic

1/4" Point of Use Pressure Regulators

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Regulator	Description	Product Info.	Source Pressure	Delivery Pressure	Certified Inboard Leak Rate	Flow Range	Body Material
64-2600 Series Enlarged View	Single Stage Ultra-High Purity 5 Ra or 10 Ra micro-inch finishes Electropolish or internal electropolish Free poppet design Hastelloy® trim available Cv=.06 (3500 PSIG max. inlet) Cv=.15 (600 PSIG max. inlet)	Catalog CAD	600, 3500 PSIG	30, 60, 100, 250 PSIG	1X10^-9	0-100 SLPM	316L SST or 316L SST VAR
64-2800 Series Enlarged View	Single Stage Ultra-High Purity Tied diaphragm design Electropolish or internal electropolish 5 Ra or 10 Ra micro-inch finishes Hastelloy® trim available Cv=.06 (3500 PSIG max. inlet) Cv=.15 (1000 PSIG max. inlet)	Catalog CAD	1000, 3500 PSIG	30, 60, 100, 150 PSIG	1X10^-9	0-100 SLPM	316L SST or 316L SST VAR
64-3600 Series Enlarged View	Single Stage Ultra-High Purity Low Droop High sensitivity 10 Ra micro-inch finishes Electropolish or internal electropolish Free poppet or tied diaphragm Hastelloy® trim available Cv=.06 (3500 PSIG max. inlet) Cv=.15 (600 PSIG max. inlet)	Catalog CAD	600, 3500 PSIG	30, 60, 100, 150 PSIG	1X10^-9	0-100 SLPM	316L SST
64-5000 Series Enlarged View	Single Stage Ultra-High Purity Absolute Pressure Sub-atmospheric pressure control 5 Ra or 10 Ra micro-inch finishes Cv=.06 (3500 PSIG max. inlet) Cv=.15 (600 PSIG max. inlet) Cv=.24 (120 PSIG max. inlet)	Catalog CAD	120, 600, 3500 PSIG	28"Hg to: 15, 30, 60, or 100 PSIG	1X10^-9	0-5 SLPM	316L SST or 316L SST VAR
74-2400 Series Enlarged View	Single Stage Ultra-High Purity Tied diaphragm design Internally springless & threadless Electropolish or Precision Electro-Polish 5 Ra or 10 Ra micro-inch finishes Cv=.15	Catalog CAD	600 PSIG	30, 60, 100 PSIG	1X10^-9	0-100 SLPM	316L SST VAR
12 Series Enlarged View	Single Stage Ultra-High Purity Miniature Tied diaphragm design 5 Ra or 10 Ra micro-inch finishes Internally springless & threadless Electropolish or Precision Electro-Polish 12F Series features integrated outlet filter 1.5", 1.125" "C" or "W" seal	Catalog CAD	150 PSIG	20" Hg to: 15, 30, 60, or 100 PSIG	1X10^-9	50 SLPM & 120 SLPM	316L SST VAR

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