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TESCOM Products: HPC Gas Cabinet Pressure Regulators

High Purity Controls

Gas Cabinet / BSGS Pressure Regulators

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Regulator	Description	Product Info.	Source Pressure	Delivery Pressure	Certified Inboard Leak Rate	Flow Range	Body Material
64-2600 Series Enlarged View	Single Stage Ultra-High Purity 5 Ra or 10 Ra microinch finishes Electropolish or internal electropolish Free poppet design Hastelloy® trim available Cv = .06 (3500 PSIG max. inlet) Cv = .15 (600 PSIG max. inlet)	Catalog CAD	600, 3500 PSIG	30, 60, 100, 250 PSIG	1X10^-9	0-100 SLPM	316L SST or 316L SST VAR
64-2800 Series Enlarged View	Single Stage Ultra-High Purity Tied diaphragm design Electropolish or internal electropolish 5 Ra or 10 Ra microinch finishes Hastelloy® trim available Cv = .06 (3500 PSIG max. inlet) Cv = .15 (1000 PSIG max. inlet)	Catalog CAD	1000, 3500 PSIG	30, 60, 100, 150 PSIG	1X10^-9	0-100 SLPM	316L SST or 316L SST VAR
64-3200 Series Enlarged View	Single Stage Ultra-High Purity High Flow BSGS Tied diaphragm design 10 Ra microinch finishes Hastelloy® trim available Cv = 1.2	Catalog CAD	150, 1000, 1500 PSIG	30, 60, 100, 150, 200 PSIG	1X10^-9	0-900 SLPM	316L SST
64-3400 Series Enlarged View	Ultra-High Purity Dual stage pressure reduction 10 Ra microinch finishes Free poppet or tied diaphragm Hastelloy® Trim available Cv = .06	Catalog CAD	3500 PSIG	30, 60, 100, 150 PSIG	1X10^-9	0-80 SLPM	316L SST
64-3600 Series Enlarged View	Single Stage Ultra-High Purity Low Droop High sensitivity 10 Ra microinch finishes Electropolish or internal electropolish Free poppet or tied diaphragm Hastelloy® trim available Cv = .06 (3500 PSIG max. inlet) Cv = .15 (600 PSIG max. inlet)	Catalog CAD	600, 3500 PSIG	30, 60, 100, 150 PSIG	1X10^-9	0-100 SLPM	316L SST
64-5000 Series Enlarged View	Single Stage Ultra-High Purity Absolute Pressure Sub-atmospheric pressure control 5 Ra or 10 Ra microinch finishes Cv = .06 (3500 PSIG max. inlet) Cv = .15 (600 PSIG max. inlet) Cv = .24 (120 PSIG max. inlet)	Catalog CAD	120, 600, 3500 PSIG	28"Hg to: 15, 30, 60, or 100 PSIG	1X10^-9	0-5 SLPM	316L SS or 316L SST VAR
74-300A Series Enlarge View	Single Stage Ultra-High Purity Absolute Pressure Free poppet design Internally threadless 5 Ra or 10 Ra microinch finishes Cv = .5	Catalog (TBD) CAD	300 PSIG	28"Hg-15 PSIG	1X10^-9	0-20 SLPM	316L SST VAR
74-2400 Series Enlarged View	Single Stage Ultra-High Purity Tied diaphragm design Internally springless & threadless 5 Ra or 10 Ra microinch finishes Precision Electro-Polish Cv = .06	Catalog CAD	3500 PSIG	30, 60, 100 PSIG	1X10^-10	0-100 SLPM	316L SST VAR
74-3800 Series Enlarged View	Single Stage Ultra-High Purity High Flow Internally springless & threadless Electropolish or Precision Electro-Polish 5 Ra or 10 Ra microinch finishes Tied diaphragm design Cv = .5	Catalog CAD	600, 1000, 3500 PSIG	30, 60, 100, 150 PSIG	1X10^-9	0-500 SLPM	316L SST VAR
449-254 Series Enlarged View	Single Stage High Pressure BSGS Free poppet design 10 Ra microinch finish Hastelloy® trim Cv = 1.0	Catalog CAD	1500 PSIG	400 PSIG	1X10^-9	0-900 SLPM	316L SST

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