Semiconductor/Photovoltaic

IGS Pressure Reducing Regulators

(available to meet SEMI Doc. PR3.1 & PR3.3-0699)

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Regulator
Description
Product Info.
Source Pressure
Delivery Pressure
Certified Inboard Leak Rate
Flow Range
Body Material

12 Series
  • Single Stage
  • Ultra-High Purity
  • Miniature
  • Tied diaphragm design
  • Internally springless & threadless
  • 5 Ra or 10 Ra microinch finishes
  • Electropolish or Precision Electro-Polish
  • 12F Series features integrated filter
  • 1.5", 1.125" "C" or "W" seal
 Catalog
 
CAD		 150 PSIG 20"Hg to:
15,
30,
60, or
100 PSIG		 1X10-9

30 or 120 SLPM

 316L SST VAR

12 Series
  • Single Stage
  • Ultra-High Purity
  • Miniature
  • Free poppet design
  • Internally  threadless
  • 5 Ra or 10 Ra microinch finishes
  • Electropolish or Precision Electro-Polish
  • 1.5", 1.125" "C" or "W" seal
Catalog
 
CAD		 150 PSIG 20"Hg to:
15,
30,
60, or
100 PSIG		 1X10-9 30 SLPM 316L SST VAR
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