Semiconductor/Photovoltaic
IGS Pressure Reducing Regulators
(available to meet SEMI Doc. PR3.1 & PR3.3-0699)
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Regulator |
Description |
Product Info. |
Source Pressure |
Delivery Pressure |
Certified Inboard Leak Rate |
Flow Range |
Body Material |
![]() 12 Series |
|
Catalog CAD |
150 PSIG | 20"Hg to: 15, 30, 60, or 100 PSIG |
1X10-9 |
30 or 120 SLPM |
316L SST VAR |
|
Catalog CAD |
150 PSIG | 20"Hg to: 15, 30, 60, or 100 PSIG |
1X10-9 | 30 SLPM | 316L SST VAR |




