High Purity Controls

IGS Diaphragm Valves

(available to meet SEMI Doc. PR3.1 & PR3.3-0699)

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Valve
Description
Product Info.
Source Pressure
Certified Inboard Leak Rate
Flow Range
Body Material

  • AOP
  • 14-21 Normally Closed
  • 14-31 Normally Open
Catalog
 
CAD
125 PSIG <1X10-9 .35 316L SST VAR

  • Manual
  • 14-11  1/4 turn, knob
Catalog
 
CAD
250 PSIG <1X10-9 .35 316L SST VAR

  • Manual
  • 14-13  1/4 turn, knob, LOTO
Catalog
 
CAD
125 PSIG <1X10-9 .35 316L SST VAR

 

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