12 Series
Pressure Reducing Regulator
The 12 Series Pressure Reducing Ultra-High Purity Regulator by TESCOM is designed exclusively for the demands of the new 300 mm process tools. The innovative design offers unsurpassed droop and repeatability in an extremely small package.
- Product of choice for state-of-the-art OEM gas systems
- Ultra-sensitive pressure control - enhances MFC performance
- Superior performance in a wide range of applications
- Flows from 2 sccm to 50 SLPM
- Unsurpassed droop and repeatability in a micro component
